Download Advanced MOS Device Physics by Norman G. Einspruch PDF

By Norman G. Einspruch

ISBN-10: 0122341015

ISBN-13: 9780122341014

ISBN-10: 012234118X

ISBN-13: 9780122341182

Includes contributions from a dozen execs from the inner most quarter and academia. Discusses a number of gadget physics subject matters of specific curiosity to and college researchers in electric engineering, laptop technological know-how, and digital fabrics. Emphasizes actual description, mode

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In general, undesirable small-geometry effects such as short-channel threshold shifts and punchthrough are more severe in /7-channel transistors than their n-channel counterparts. This is due in part to the fact that no slow diffusing /7-type d o p a n t exists to allow shallow P M O S s o u r c e / d r a i n regions to be formed in the way that arsenic allows shallow n diffusions to be m a d e . Practical p-channel devices are limited to the use of boron as a s o u r c e / d r a i n + 54 Alan G.

An additional technique used for reducing the surface p-layer width is to raise the n-type doping below the boron-doped layer. The junction depth then lies further up the tail of the boron distribution, and so is shallower. Furthermore, the transition from p- to n-type doping is sharper, and this also helps to reduce drain-induced barrier lowering. This increased doping can either be achieved using the phosphorus punchthrough suppressing implant discussed previously, or it has been proposed that an additional arsenic implant be a d d e d immediately after the boron implant specifically for this purpose [23].

Shallow junctions and acceptable n diffusion sheet resistances ( < 5 0 ( ! / • ) are readily achieved using arsenic implantation since arsenic ions have a low implantation range and low thermal diffusivity. In general when designing a MOS process, it is necessary to account for variations in the final gate length produced by processing fluctuations, primarily in photolithography and etching. The smallest device likely to be produced must retain acceptable characteristics. 2-|xm nominal length. The minimum effective (or electrical) channel length (which corresponds very closely with the separation of the source and drain metallurgical junctions) is smaller than the minimum gate length, typically 1/3 } s ox d + 2.

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Advanced MOS Device Physics by Norman G. Einspruch


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