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ISBN-10: 0080577148

ISBN-13: 9780080577142

ISBN-10: 0120146495

ISBN-13: 9780120146499

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Extra resources for Advances in Electronics and Electron Phisics. Vol. 49

Example text

In the works by Jerrard (1969a), Matheson et al. (1976), and Schueler (1969), the only subject under discussion was the problem dealing with the effect of the experimental errors that arise while determining the angles of polarization on the measurement results. 1 8, or even of several hundredths of an angstrom. Of course, in the present case the mean film thickness within the operating light beam cross section is meant. In the work by Svitashev et al. (1972b), it is shown that the basic sources of error in measuring the absolute values of the film thickness and refractive index are the errors in prescribing the presumably known parameters and experimental conditions, when creating a nomogram necessary to determine df and n,.

RZHANOV A N D K. K. SVITASHEV All procedures for estimating angles $ and A by directly measured quantities can be obtained on the basis of the analysis of the expression for the output light intensity derived in Section 111-A of the present survey. When deriving this expression, we neglected the effects of multiple light reflection in the optical components of the ellipsometer. However, such an idealization is justifiable, since the experimental values of A and $, calculated following formulas (95) and (96), are in close agreement with the theoretically predicted ones in those cases when the equivalence of the reflecting system model to the real object is beyond any doubt.

18. ,,N, = 2 - i0). Dark circles and light triangles indicate calculations-numbers near points indicate the film thickness in angstroms. Crosses and tight circles are the results of measurements of the generalized angles at M = 50 A and A I = 1200 A, respectively. &, is the operating wavelength. 48 A. V. RZHANOV A N D K. K. SVITASHEV values of the polarizing angles A and $ and the df and nf film parameters exists within the range 0 5 df 5 do only. , df = d o d,. Here m is the integer and d , < d o .

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Advances in Electronics and Electron Phisics. Vol. 49 by Author Unknown


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